瀏覽次數:190by:貝斯科技
BPE-400 4" probe station
specification:
1.4"wafer stainless vacuum chuck
2.chuck x-y stage行程101.6mmx101.6mmring
3.Chuck X-Y stage distance 4”x4”
4.Chuck theta rotation 0°～360° manual微調
5.Platen U型固定不動
6.chuck x-y stage最小移動距離2um
7.chuck 面積4"卡盤平整度:5um
9.Box底座尺寸(450mm長x320mm寬x50mm高)
specification:
1.4"wafer stainless vacuum chuck
2.chuck x-y stage行程101.6mmx101.6mmring
3.Chuck X-Y stage distance 4”x4”
4.Chuck theta rotation 0°～360° manual微調
5.Platen U型固定不動
6.chuck x-y stage最小移動距離2um
7.chuck 面積4"卡盤平整度:5um
9.Box底座尺寸(450mm長x320mm寬x50mm高)
#probe#4"#探針台#針座#Triaxial#距離#行程
