瀏覽次數:104by:貝斯科技

Specification:
1.Chuck Size:  4" 6”, 8”, 12”
2.Chuck Planarization: +/- 10um
3.Temp. Range: Ambient ~ 100/150/200/300/400/500/600°C
4.Temp. Accuracy: +/- 0.5°C
5.Power to Heat: AC/DC

#hot#chuck#加熱盤#8"#12"#4"